An actuator with nano-positioning capability has long been the key technology in various micro-manufacturing applications. Among various types of nano-positioning actuators, the solid-state Piezoelectric (PZT) actuators have been the most popular choice due to their large actuating force and high stiffness. Unfortunately, PZT actuators have limited strokes that make them unsuitable for high-precision systems with larger workspaces.

Instead of using PZT actuator, a Flexure-based Electromagnetic Linear Actuator (FELA) is developed. It is an electromagnet-driven flexure-supported nano-positioning actuator that possesses the excellent features as listed in the benefits below.

• Permanent magnet based stator with a moving air-core coil for high dynamic response
• Dual-magnet arrangement offering a uniform flux distribution and 40% increase in magnetic flux density within a large air gap for large output force
• Air-core coil offering linear current-force relationship for high control resolution
• Flexure-supported moving coil for frictionless and backlash-free motion

• ±10 nm positioning accuracy
• 4 mm stroke in a compact-sized design
• 60 N/Amp force sensitivity in a compact-sized design
• 100 mm/sec actuating speed
• A PCT patent filed

• Layer-over-layer soft-nanoimprint process.
• Direct force control for micro hot-embossing or die-attaching tool heads
• Various nano-positioning systems
• Active vibration control